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■ REZULTATE ETAPA I
- Au fost realizate studii experimentale de evaluare a eficientei a trei tipuri de sticla pentru microfluidica (sticla Hoya SD – 2; sticla SODA LIME si sticla Corning 7740).
- Aceste studii au stat la baza selectiei tipului optim de sticla pentru realizarea ulterioara a platformelor microfluidice. In urma experimentelor a rezultat ca tipul optim de sticla pentru realizarea platformelor microfluidice este Corning 7740
- A fost dezvoltata tehnologia de corodare a sticlei prin masti metalice care au stress tensil (CrAu, TiAu, CrCu)
- A fost dezvoltata tehnologia de obtinere a matritelor din SU8 pentru realizarea platformelor microfluidice in PDMS pe substrat de sticla, prin tehnici de corodare umeda si corodare uscata
- S-a facut analiza si selectia optiunilor tehnice si s-au lansat comenzile pentru achizitia materialelor necesare realizarii miniechipamentului de corodare uscata cu XeF2: tipuri de senzori de gaz necesari, manometre, reductoare de presiune, tipul si caracteristicile pompei de vid si conectica necesara, tipuri de filtre utilizabile, selectia electrovanelor optime pentru gazele obtinute prin sublimarea cristalelor de XeF2
- S-a realizat proiectul tehnic de constructie a miniechipamentului de corodare uscata cu XeF2
- a fost proiectata structura mecanica a miniechipamentului;
- a fost proiectat sistemul de distributie a gazelor
- au fost proiectate sistemele de comanada (hardware)
- a fost proiectata interfata de comanda si control a miniechipamentului
Bibliografie
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