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Wednesday, October 13, 15:30, Room “B”
MICRO AND NANO
TECHNOLOGY
Session MNT: Oral presentations
Chair:
G. Deligeorgis, LAAS-CNRS, Toulouse, France
F. Craciunoiu, IMT-Bucharest, Romania
MNT. 1
15:30 |
LASER ABLATION OF POLYIMIDE THIN FILMS, M.-D. Damaceanu, R.-D. Rusu, M. Olaru, M. Bruma, “Petru Poni” Inst. of Macromolecular Chemistry, Iasi, Romania. |
MNT. 2
15:50 |
V-SHAPE THROUGH WAFER VIA MANUFACTURED BY DRIE VARIABLE ISOTROPY PROCESS, D. Vasilache, S. Colpo, S. Ronchin,
F. Giacomozzi, B. Margesin, FBK-irst Trento, Italy. |
MNT. 3
16:10 |
LOW STRESS PECVD AMORPHOUS SILICON CARBIDE FOR MEMS APPLICATIONS,
M. Avram1, A.M. Avram1, A. Bragaru1, B. Chen2,
D.P. Poenar3, C. Iliescu2, 1IMT-Bucharest, Romania, 2Inst. of Bioengineering and Nanotechnology, 3Nanyang Technological Univ., Singapore. |
MNT. 4
16:30 |
INFLUENCE OF TECHNOLOGICAL PARAMETERS ON THE DYNAMIC BEHAVIOR OF A MEMS ACCELEROMETER, C.D. Comeaga, G. Ionascu, E. Manea*, A. Sandu, L. Bogatu, D. Besnea, ”Politehnica” Univ. of Bucharest, *IMT-Bucharest, Romania. |
MNT. 5
16:50 |
SELECTION OF GAS SENSING MATERIALS USING THE HARD SOFT ACID BASE THEORY; APPLICATION TO SURFACE ACOUSTIC WAVE CO2 DETECTION, B. Serban, A. K. Sarin Kumar*, C. Cobianu, O. Buiu, S. Costea,
C. Bostan, N. Varachiu, Honeywell Romania SRL, Bucharest, Romania, *HTS-Research, Honeywell Technology Solutions, Bangalore, India. |
MNT. 6
17:10 |
IMPACT OF LIGHT QUANTUM IN RAPID PHOTOTHERMAL DIFFUSION OF Zn IN GaAs, S.T. Shishiyanu, T.S. Shishiyanu, Technical Univ. of Moldova, Chisinau, Moldova. |
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