Centre of Nanotechnologies has access to the IMT-facilities, as follows:
Clean room (class 100); Photolithogra-phic mask shop fabrication; Exposure and Double- side mask alignment machine for 3 and 4 inch wafers; Spinner for photosensitive materials deposition; Equipments for silicon microfabrication: CVD and PVD echipments; Thermal processes furnaces, Plasma Etching machine; Thermostatic chemical stoves with ultrasonic stirring, 6 pieces; Laminar flow bench, with UV lamp for handling of biological probes Spectroscopic Ellipsometer in the UV-VIS range; Atomic force microscope.
Other facilities in Centre of Nanotechnologies are: Keithley model 6487-picoammeter /voltage source; Porous silicon power supply; Trace LabVoltaLab 50 (PST050 & VoltaMaster 4); Thermostat stove for biological materials treatment; Transmission- reflexion- fluorescence microscope with images acquisition and measurement system.