Romania and IMT-Bucharest in the Europractice world

RF MEMS Laboratory

Dr Contact person: Dr. Alexandru Muller  ([email protected])
Web site:  www.imt.ro

IMT offer in RF MEMS:

advanced design and electromagnetic modelling of micromachined lumped elements, filters, antennae, receivers, phase shifters, switches in the millimeter and submillimeter wave range;
mechanical modelling;
masks manufacturing;
technological design;
cooperation for electrical characterization and technological processing;
organizing of workshops and seminars;
training courses.

IMT expertise:

Manufacturing of lumped elements and distributed filters supported on thin dielectric membranes (1.5�m SiO2/Si3N4/SiO2) with operating frequency up to 100GHz (Fig. 1; Fig. 2);

Fig. 1 Silicon micromachined filters for 38 GHZ (left) and for 77GHz (right)

Fig.2 On wafer measurements for the 38GHz (left) and for the 77 GHZ (right) micromachined filters.

GaAs membrane supported filters for millimeter and submillimeter wave (Fig. 3);

Fig. 3 GaAs micromachined filter for 45 GHz

Fig. 4 S parameters measurements and simulation of the GaAs micromachined filter for 45 GHz

Micromachined antennas for millimeter and submillimeter wave (Fig. 7);

Fig. 7 Band-pass filter and Yagi-Uda antenna fabricated on the same membrane Fig. 8 Measured return losses of the band-pass filter and Yagi-Uda antenna fabricated on the same membrane

Design and modelling of micromachined RF circuits (Fig. 5; Fig. 6);

Fig. 5 Microstrip Antenna Array:
4-patch transmitter antenna layout (left) and simulated 3D radiation pattern (right)

Fig. 6 Double folded slot antenna array for the 38GHz silicon micromachined hybrid receiving module: antenna layout (left) and simulated current density distribution (right)

Micromachined receiving modules for millimeter and submillimeter wave (Fig. 9).

Fig. 9 GaAs micromachined monolithic integrated receiving module for 38 GHz

Fig. 10 Experimental voltage sensitivity at several DC bias currents of the 38 GHz monolithic integrated receiver

Part of the fabrication has been done in Toulouse (France), Trento (Italy) or Heraklion (Greece).

                                       All these results have been achieved in national as well as international research projects (bilateral projects, FP 4 Inco Copernicus)

Current work

Research projects in the frame of National programme MATNANTECH
NoE in the frame of FP 6: "AMICOM"(Advanced MEMS for RF and Millimeter Wave Communications)
Bilateral cooperations with Italy, France, Greece, Hungary
Project in a joint lab with SAIT (Samsung Advanced Institute for Technology)