Many types of high resistivity thin layers with a dielectrical characteristic over UV-VIS-NIR spectral range have been obtained by vacuum thermal evaporation and RF sputtering methods: CdS (0.10-1.75μm), ZnO (0.55 μm), TiO2 (0.25-0.30 μm) mettalic layers of Mn and Ag (0.05 - 0.10 μm).