CURRICULUM VITAE
First name: Ioana
Surname: Petrini
Date and place of birth: 10.11.1949
Education: M.Sc. in Solid State Physics, University of Bucharest, 1972
Professional experience :
Manufacturing of silicon microwave diodes (pin, varactor and step recovery diodes) and microwave GaAs diodes (Gunn diode and Schottky diode).
Manufacturing of silicon microwave power transistors
Micromachining of silicon and GaAs for microwave and millimeter wave circuits supported on thin dielectric membranes
Technological design and processes for pressure sensitive structures using polyimide membrane on micromachined GaAs
Career:
Sept.1972-Nov.1996 researcher at ICCE Bucharest
Nov. 1996- present senior resarcher at IMT Bucharest
Stages abroad:
Italy: CNR-M2T Microwave Microsystem Technology, Rome, Dec.1996, June 1997, May 1998, , Nov 1999, ITC-IRST Trento, Sept 2001
Greece: FORTH-IESL Heraklion, Oct. 1998
Hungary: HAS-MFA Budapest, Dec 2001
Present position: Senior researcher in the Laboratory of Micromachined Microwave Circuits at IMT Bucharest
Research interests: Micromachining technologies, RF MEMS, Microphysical characterisation
Past and current projects:
EU Project: participant in the INCO-COPERNICUS Project 977131 MEMSWAVE (1998-2001) "Micromachined Circuits for Microwave and Millimeter Wave Applications" (IMT as co-ordinator, participants: Uppsala Univ., CNR Rome, Tor Vergata Univ. Rome, IRST Trento, MFA Budapest, FORTH Heraklion, ISP & Mikrosensor Ltd. Kiev).
"Development of micromachining structures on silicon and GaAs for sensors and microwave applications" (1996-2000), project in the frame of bilateral cooperation with CNR-M2T Italy/participant
"Micromachined structures on AIIIBV semiconductor compounds for high temperature sensors applications" (1998-20000) and "Millimeter wave circuits supported on polyimide and semiconductor membranes on AIIIBV semiconductor compounds substrate for telecommunication applications" (2000-2002) projects in the frame of bilateral with FORTH-IESL Heraklion/participant
"New materials and technological processes for silicon based RF MEMS and high performance sensors" (2000-2004) project in the frame of bilateral cooperation with ITC-IRST Trento/responsible
Microwave circuits and devices on AIIIBV semiconductor compounds project in the frame of interaccademic cooperation with HAS-MFA Budapest/participant
National current projects:
"Technologies for manufacturing of microsystems based on III-V compound semiconductors and polymides used in communications"(2001-2004) MATNANTECH Project/participant
"Millimeter wave receiving microsystems manufactured by silicon micromachining" (2002-2004) ) MATNANTECH Project/participant
"Center of excellence in microstructures and microsystems for centimeter, millimeter and submillimeter applications"(2002-2005) MATNANTECH Project/participant
Main scientific publications:
Books:
"Micromachined Microwave Devices and Circuits" Editors: H.Hartnagel, D. Dascalu, R.Plana, A.Muller, Editura Academiei Romane, 2002, the chapter"Polyimide membranes on GaAs substrate as support of lumped elements, microphysical characterizationand stress analysis" authors I.Petrini, A.M�ller, S.Iordanescu, F.Giacomozzi, G.Constantinidis, D.Vasilache, V.Avramescu, pp 102-115
Papers in periodicals (usual reference data, a selection):
A.Muller, R.Marcelli, Ioana Petrini, S.Iordanescu, V.Avramescu, D.Vasilache "Dielectric Membrane Support", European Semicoductors oct.1997, p.27 R. Marcelli, P. De Gasperis, C. Risi, A. M�ller, Ioana Petrini, V. Avramescu, S. Iordanescu, D. Dascalu, G. Bartolucci "Micromachined circuits for microwave and millimeter wave applications" MST News, no. 2, pp. 23-24, 1999.
Ioana Petrini, A. M�ller, V. Avramescu, G. Simion, N. Nitescu, D.Vasilache, D. Dascalu, G. Konstantinidis, "Resistive pressure sensing structures on polyimide membranes on GaAs substrate", Journal of Micromechanics and Microengineering, vol.10, p. 218-222, 2000
Ioana Petrini, A. M�ller, V. Avramescu, S. Iordanescu, D. Dascalu, "Microwave micromachined structures on <100> silicon substrate using polyimide supported pads", Microelectronic Engeneering, vol 51&52, p.595-600, 2000.
A. M�ller, S. Iordanescu, Ioana Petrini, V. Avramescu, G. Simion, D.Vasilache, V. Badilita, D. Dascalu, G. Konstantinidis, R. Marcelli, G. Bartolucci, "Polyimide based GaAs micromachined millimeter wave structures", Journal of Micromechanics and Microengineering, vol.10, No 2, p. 130-135, 2000.
A. M�ller, G. Konstantinidis, F Giacomozzi, M Lagadas, G Deligeorgis, S. Iordanescu, Ioana Petrini, D.Vasilache, R. Marcelli, G. Bartolucci, D Neculoiu, P Blomdy and D Dascalu "Micromachined filters for 38 and 77 GHz on thin membranes", Journal of Micromechanics and Microengineering, vol.11, No 4, p. 301-306, 2001.
D. Vasilache, A. Muller, V. Avramescu, I. Petrini, S. Iordanescu "Air bridges for MMICs" Romanian Journal of IST, vol. 3, No.1, p95-99, 2000
R. Marcelli, F. Giacomozzi, B. Margesin, M. Zen, A. M�ller, S. Iordanescu, I. Petrini, V.Avramescu, G. Bartolucci, and S. Ciorciolini: "Design of Coplanar Micromachined Microwave Circuits", Romanian Journal of Information Science and Technology, Vol.3, No.1, pp.63-74, 2000.
Other contributions (usual reference data, a selection):
A.Muller, Ioana Petrini, V.Avramescu - "Planarization Techniques used in GaAs Discrete Devices and MMICs Manufacturing ", Proc. of the 16th Turkish Physical Society Conference, Aivalyk, Turkey, 1996.
A.Muller, Ioana Petrini, V.Avramescu, S. Iordanescu, R.Marcelli, V.Follieti, M.Dragoman - "10 m m Thin GaAs Membrane Manufactured by Nonselective Etching", Micromachining and Microfabrication Process Technology Conference, SPIE'97, Austin,USA, paper 3223-3225, 1997.
A.Muller, Ioana Petrini, V.Avramescu, R. M�ller, D Vasilache, P. Cosmin, I. Cernica, R. Marcelli - "Dielectric and Semiconductor Membranes As Support for Microwave Circuits", Proc. of CAS97, Sinaia, Romania, p. 549, 1997.
A.Muller, R. Marcelli, Ioana Petrini, V.Avramescu, S.Iordanescu, D. Vasilache - "Dielectric and Semiconductor Membranes As Support for Lumped Elements and Coplanar Waveguides", MME97, Southampton, UK, p.59.
A.Muller, Ioana Petrini, R.Marcelli, S.Iordanescu, V.Avramescu, D.Vasilache - "Dielectric and Semiconductor membranes as Support for Microwave Circuits", Proc. of MELECON Conference98, Tel Aviv, Israel, p.387.
A.Muller, D.Dascalu, D.Neculoiu, S.Iordanescu, Ioana Petrini, V.Avramescu, D.Vasilache, R.Marcelli - "Meader and S line Iductors o Thi Dielectric Membranes Manufactured by Anisotropic and Isotropic Ettching of Silicon", Proc. of MME98 Workshop Ulvik in Hardanger, Norway, p. 151.
D. Vasilache, S. Iordanescu, V. Avramescu, Ioana Petrini, R. Rizescu, A. M�ller "Air bridge and planar inductors for MMICs", Proc. of CAS98, Sinaia, Romania, p. 609.
S.Iordanescu, A.Muller, R.Marcelli, G.Bartolucci, Ioana Petrini, D.Vasilache, V.Avramescu - "Microwave planar lumped circuit elements on micromachined thin dielectric membranes", Proc. SPIE - Design, Test, and Microfabrication of MEMS/MOEMS, Vol. 3680/Part two, 1999, Paris, France, p. 1180.
A.M�ller, S.Iordanescu, Ioana Petrini, V.Avramescu, G.Simion, D.Vasilache, V.Badilita, D.Dascalu, G.Konstantinidis, R.Marcelli, G.Bartolucci-"Polyimide based GaAs micromachined millimeter wave structures", Proc. of MME99, 27-28 Sept99, Gif sur Yvette, France, p. 116.
Ioana Petrini, A. M�ller, V. Avramescu, G. Simion, N. Nitescu, D. Vasilache, D. Dascalu, G. Konstantinidis - "Resistive pressure sensing structures on polyimide membranes on GaAs substrate", Proc of MME99, 27-28 Sept.1999, Gif sur Yvette, France, p. 85.
A. M�ller, S. Iordanescu, Ioana Petrini, V. Avramescu, D. Dascalu, G. Konstantinidis, R. Marcelli, K. Hjort, D. Pasquariello, G. Bartolucci, F. Giacomozzi, B. Szentpali "Dielectric Membranes Supported Millimeter-Wave Passive Circuits", MEMSWAVE WORKSHOP, Sinaia, Romania, Oct.1999.
A.M�ller, S. Iordanescu, I. Petrini, V. Avramescu, G. Simion, D.Vasilache, V. Badilita, D. Dascalu, G. Konstantinidis, R. Marcelli, G. Bartolucci, "Polyimide based GaAs micromachined millimeter wave structures", Journal of Micromechanics and Microengineering, 10(2000), pp.130-135.
I.Petrini, A.M�ller, V.Avramescu, G.Simion, N.Nitescu, D.Vasilache, D.Dascalu, G.Konstantinidis, "Resistive pressure sensing structures on polyimide membranes on GaAs substrate", Journal of Micromechanics and Microengineering, 10(2000), pp. 218-222..
Ioana Petrini, A. M�ller, V. Avramescu, S. Iordanescu, D. Dascalu, "Microwave micromachined structures on <100> silicon substrate using polyimide supported pads", Microelectronic Engineering, Elsevier Science, 51-52(2000), pp. 595-600.
D.Vasilache, A.M�ller, V.Avramescu, Ioana Petrini, S.Iordanescu "Air Bridges for MMICs", J. of Romanian Academy, 2000, 95-99.
A. M�ller, I. Petrini, S. Iordanescu, V. Avramescu, D. Dascalu, Membrane supported circuits for microwave and millimeter wave applications manufactured by silicon and GaAs micromachining", "NEXUS News", 2000.
A, Muller, D. Neculoiu, F. Giaccomozzi, I. Petrini, C. Buiculescu, D. Vasilache, V. Avramescu, D. Dascalu, M. Zen, "Silicon based micromachined receiving module for 38 GHz with bonded GaAs Schottky detector diode" Micromechanics Europe (MME), Cork, Ireland, Sept. 2001
G. Constantinidis, A. Muller, D. Neculoiu, I. Petrini, D. Vasilache, M. Lagadas, C. Buiculescu, V. Avramescu, P. Blondy :"GaAs membrane supported millimeter wave filters", Proc of SPIE Vol 4559, 2001, pp157-164
I.Petrini, F.Giacomozzi, G.Constantinidis, D.Vasilache, V.Avramescu, A.Muller "Polyimide membranes on GaAs substrate as support for lumped elements, microphysical characterisation and stress analysis" MEMSWAVE Workshop 2001
A.Muller, F.Giacomozzi, I.Petrini, C.Buiculescu, D.Vasilache, M.Dragoman, V.Avramescu, D.Dascalu, M.Zen "Silicon based micromachined millimeter wave receiving modules with bonded GaAs Schottky diodes" MEMSWAVE Workshop 2001;
Ioana Petrini, F.Giacomozzi, D.Neculoiu, D.Vasilache, C.Buiculescu, A.M�ller: "Micromachined hybrid integrated receiver modules for 38 GHz and 77 GHz, on silicon substrate, technology and manufacturing" Proc of CAS 2002, Sinaia, Romania, pp 29-32
G. Konstantinidis, A. Muller, D. Vasilache, M. Lagadas, G. Deligeorgis, L. Bary, R. Plana,I. Petrini, C. Buiculescu, D. Neculoiu, "Recent Developments in mm-Wave Circuits Supported on Thin GaAs Membranes" accepted paper at 3rd ESA Workshop on Millimetre Wave Technology and Applications: circuits, systems, and measurement techniques, May 21-23, Espoo, Finland
Additional information (expertise, prizes, etc.):
The MEMSWAVE project was selected among the first 10 European projects finalised in 2001, for the Descartes Prize 2002.
Foreign languages: English, French
Contact information (e-mail, tel., fax. mailing address):[email protected],
Phone: +40-21-490.85.81, +40-21-490.82.12; Fax: +40-21-490.82.38