A. M. AVRAM, M. AVRAM, C. ILIESCU
The Gear Wheels Microsystem for Biodynamical Applications

Abstract.
The purpose of this research was to model, design and fabricate a microdynamic system, using a four masks silicon micromachining process and sacrificial layers technique. The micromachining of the polysilicon gear wheels system, with external diameters of 250 µm, 200 µm, 160 µm and 3 µm thickness, combines the undercut and refill technique with pin-joint bearing permitting the fabrication of bushings that can be used, for example, to elevate the rotor away from the silicon surface. The microfluidic dynamic system consists of a gear wheels system, an electromagnetic micropump and a magnetic controller. Each device is fabricated by silicon micromachining technology and tested to obtain the specific characteristics.