Cambridge technology platform for CMOS ubiquitous micro sensors
Florin Udrea
This paper describes the smart CMOS technology for sensors developed at Cambridge for over two decades. Starting with a silicon-on-insulator platform and moving towards a bulk process, the technology platform comprises, micro-hotplates, gas sensors, microcalorimeters, Infrared emitters and detectors, flow and pressure sensors, temperature and humidity sensors. Some of these sensors (gas sensors, Infrared devices) have been commercialised by Cambridge CMOS Sensors, recently acquired by ams, while others (flow and and temperature) are being commercialised by Flusso a new spin-off from Cambridge University.