Metrology Solutions For Electronics Nanoscale Nodes
Marius Enachescu, Center for Surface Science and Nanotechnology University Politechnica of Bucharest (Romania)
The importance and necessity of semiconductor devices in our lives is indisputable. Researchers and engineers are devoting continuous efforts to develop key technologies for the new ICs generations with increasingly smaller electronic nodes following the Moore's Law. Current developments are targeting 3nm and 2nm nodes. One of the crucial pillars that allow such technological advances is the metrology. It is mandatory to optimize/develop the metrological tools and enable them to meet the requirements imposed by the new electronic nodes. CSSNT-UPB offers state-of-the-art metrological solutions/services in support of industrial developments, carried out within the most challenging nanoelectronics projects (e.g. R3POWER-UP, REACTION, OCEAN12, MADEiN4, PiN3S, IT2, BEYOND5).