Workpakage WP 2.3 - Development of the characterization techniques [...]
Objectives:
- microphysical charaterization (i.e. optical parameters, dimensions, roughness, geometry of the resist and substrate window obtained by nanolithography).
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design and set-up experiments for characterizing the micro/nano optical structures and devices.
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Development of the characterization techniques
- Results:
new techniques, experimental set-up
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