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Dual pressure and temperature sensors based on GaN membrane supported Surface Acoustic Wave (SAW) devices


KEY PERSONS

Dr. Alexandra Nicoloiu (Stefanescu) ([email protected])

Dr. Alexandra Nicoloiu (Stefanescu) graduated from Politehnica University of Bucharest, Faculty of Electrical Engineering, in 2006 and obtained her PhD in 2010. She participated as a team member in several national and European projects (FP6, FP7, ESA, ENIAC). She joined IMT-Bucharest in 2009 in the frame of the FP7 MIMOMEMS. Between 2012 – 2016 Dr. Alexandra Nicoloiu was partner team leader in a national project (Partnership) dedicated to advanced methodologies for the simulation of RF-MEMS switches and between 2015 – 2017 she coordinated a national project (Human resources, Young Research Teams).

Her current research activities focus mostly on the numerical analysis and experimental development of GHz acoustic devices on WBG materials (GaN, AlN) working as sensors.

She is involved in the team of two H2020 FET-OPEN projects dedicated to spin waves for quantum computing. In H2020 CHIRON project (2018 – 2021) she is involved in the development of magnetic sensors based on SAW devices on GaN/Si working at frequencies around 10 GHz. She is the (co-) author of more than 40 papers in journals and conference proceedings; h-index 8 (Google Scholar).

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Dr. Alexandru Muller ([email protected])

He obtained M.Sc.in physics (1972) and PhD in Semiconductor Physics at Bucharest University in 1990;

In the early years of his career he worked on the design manufacturing and characterization of silicon microwave diodes (varactor, pin, multiplier SRD’s) and GaAs Schottky diodes, developing new innovative technological processes and high performance devices used in various industrial applications.

His PhD thesis was focused on a new physical model describing the switching behavior of narrow base pin diodes. This model was used in the optimization of the efficiency of microwave step recovery multiplier diodes. Results have been partially published in Solid State Electronics vol 32, pp. 593-601, 1989 (A Muller and S Voinigescu "Heavy doping ftfects and stored charge characteristics in narrow base PIN diodes").

Competences
- Silicon, GaAs and GaN micromachining and nanoprocessing, manufacturing of RF MEMS components and circuits, manufacuring of microwave passive membrane supported circuits, micromachined inductors, filters and antennae, monolithically as well as hybrid integrated receiver modules.

- developing acoustic devices (SAWs and FBARs) based on micromachining and nanoprocessing of wide bandgap semiconductors (GaN, AlN). The performances of the SAW and FBAR structures on GaN represent the actual state of the art in the topics. Results were published in IEEE El Dev. Lett. in 2009 and 2010. Dr Muller is now involved in developing of temperature and humidity sensors based on GaN GHz SAW and FBAR structures.
- In the last years Dr. Müller was involved in characterization techniques of microwave semiconductor devices and acoustic devices at cryogenic temperatures (1.5 – 6K) with/without magnetic field and also regarding devices, technology and characterization techniques for the quantum computing domain.

Publications
Dr Muller has published a few tens of papers in high ranked ISI journals like IEEE Electron Dev. Letters, Applied Optics, Thin Film Solids, Appl Phys Lett, Journ. of Micromech. and Microengng, IEEE Trans on MTT, Superlatice & Microstructures etc.. In most of them he was the first author. Dr Muller has more 100 papers in conference proceedings, and has written chapters in books published in Spriger, Francis &Taylor," Editura Academiei" printing houses.

Dr. Muller is reviewer at Elsevier, IoP and IEEE journals.
Dr. Muller is member of PhD Jury in “Politehnica” Univ. Bucharest, Univ. Bucharest and Univ. Paul Sabatier/ LAAS Toulouse.
Long term stages abroad:
- a six month stage in 1991/1992 at IMEC Leven;
- a six month stage at LAAS CNRSToulouse at Director de recherce (2003);

European Projects coordinator:
coordinator of the the European FP4 „MEMSWAVE” project (1998-2001), one of the first RF-MEMS projects financed by the EC. The project was nominated in 2002 between the 10 finalists for the Descartes prize of the EC. This was the first and for a long time the only EC project in the IST topics coordinated by an Eastern European country.
coordinator of the FP7 REGPOT- MIMOMEMS (2008 – 2011) “European Centre of Excellence in Microwave, Millimetre Wave and Optical Devices, based on Micro-Electro-Mechanical Systems for Advanced Communication Systems and Sensors”.
coordinator of the H2020 Marie Curie project “Integrated Crossbar of Microelectromechanical Selectors and Non-Volatile Memory Devices for Neuromorphic Computing” SelectX (2016-2018).
coordinator of the ESA (European Space Agency) project: Contract No. 40000115202/15/NL/CBi “Microwave filters based on GaN/Si  SAW resonators, operating at frequencies above 5 GHz” (2015-2017).

Dr A Muller was and is the leader of the Romanian team in:
- FP6 NoE AMICOM, 2004-2007, coordinator LAAS Toulouse.
- FP7 Integrated Project NANOTEC, 2011-2015, coordinator Thales TRT.
- FP7 Integrated Project SMARTPOWER, 2011-1016, coordinator Thales TRT.
- FP7 related projects ( ENIAC SE2A (coordinator NXP Semiconductor Netherlands BV), MERCURE (coordinator Thales Research and Technology, France).
H2020 FETOPEN CHIRON, 2018 – 2021, coordinator IMEC Belgium
H2020 FETOPEN IQubits, 2019 -2023, coordinator Aarhus Univ. Denmark

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Phys. George Boldeiu ([email protected])

George Boldeiu graduated Electrical Engineering in 2001 and 2014 Faculty of Physics.  In 2001 he was hired in IMT Bucharest and between 2007 and 2017 he worked in the Simulation Laboratory as simulation engineer, being involved in the simulation of the electrical, mechanical and thermal phenomena of MEMS devices. For a short period, 2017-2019, he worked as thermal simulation engineer at Continental, Timisoara.

Here he developed and ensured thermal management for High Flash Lidar. In 2019 he returned to IMT and currently he activates in the Micromachined structures, microwave circuits and devices Laboratory (RF-MEMS). Starting from 2017 George is PhD student in the frame of the Electrical Engineering from Politehnica University of Bucharest, with the thesis “Influence of the structure on the dynamics of electric charges in dielectrics

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Dr. Claudia Nastase ([email protected])

Dr. Claudia Nastase graduated in 2001 and received her PhD in 2007 both from University of Bucharest, Faculty of Physics. She worked in University of Bucharest, Faculty of Physics (until December 2016), where she was involved in research activities in more than 30 national projects related to material physics.

She is the (co-) author of more than 25 papers in journals and conference proceedings. Between June 2011 and June 2012 she worked as associate researcher in CEA-IRAMIS Saclay, France. Staring from January 2017 she is employee of IMT Bucharest where her research activities include measurements of surface acoustic wave sensing structures. h-index 9 (Google Scholar).

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Dr. Ioana Zdru (Giangu) ([email protected])

Ioana Zdru (Giangu) received her MSc in 2013 and PhD in 2017 from “Politehnica” University of Bucharest, Faculty of Electronics and Telecommunications. The subject of the PhD thesis was devoted to sensors based on acoustic waves. She is employee of IMT Bucharest stating from April 2012. She participated in several national and European research projects (FP7, ENIAC). She (co-)authored more than 15 papers in journals and conference proceedings. She is involved in microwave characterization SAW devices and sensors on WBG materials. Dr. Zdru (Giangu) was awarded with the Gheorghe Cartianu prize of the Romanian Academy in 2016 for the team work dedicated to GaN/Si SAW based temperature sensors. h-index 6 (Google Scholar).

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Dr. Dan Vasilache ([email protected])

Dan Vasilache received his PhD in 2011 from Univ. POLITEHNICA of Bucharest. He is senior researcher at IMT and between 2010 and 2012 was senior researcher at FBK-irst Trento, Italy. His competences include technological design, masks design and manufacturing and technological processes development for silicon, AIIIBV semiconductor compounds and wide band gap semiconductors; he was part of the team which developed SAW structures using nanolithographic processes starting with 2007 and in last 4 years he was involved in packaging systems developing for RF MEMS structures. He co-authored 31 papers in ISI Journals and more than 175 in total and he was part of the team in more than 15 International Projects and more than 40 National Projects. h-index 14.

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Dr. Adrian Dinescu  ([email protected])

Dr. Adrian Dinescu obtained the M.Sc. degree (1993) and the PhD degree (2010), from Faculty of  Physics, University of Bucharest. Between 1993 and 1997, Adrian Dinescu was with the National Institute for Research in Electronic Components, working in the field of optoelectronic devices: fabrication and measurements.

Since 1997 Dr, Dinescu is with IMT-Bucharest, where he is currently involved in micro and nano fabrication. His expertise includes: e-beam lithography, thin film deposition by e-beam evaporation, field emission scanning electron microscopy and energy dispersive spectroscopy. From 2012 to 2017 Dr. Dinescu acted as Technical Director and from 2017 he is the general manager of IMT.

Dr. Adrian Dinescu coordinated 10 national research projects, one H2020 project and was the coordinator from the Romanian part of the FP-7 project. He co-authored about 75 papers in refereed international journals.

 

 

 

News


Results 2022

Results


Results 2022

 


Project financed by UEFISCDI
PNIII, P2, Programme Increasing the competitiveness of the Romanian economy through RDI, Demonstration experimental project,
PN-III-P2-2.1-PED-2019-0052, Contract no. 228PED din 03/08/2020.

 

Contact information

National Institute for Research and Development in Microtechnologies
IMT Bucharest
Project manager: Dr. Alexandra Raluca NICOLOIU
E-mail: alexandra[dot]nicoloiu[at]imt[dot]ro