Description

LINDBERG thermal processing furnaces: Oxidation, diffusion and thermal treatments at high temperatures and at atmospherically pressure it will be executed in “diffusion furnaces” LINDBERG type. Maximum dimension of the substrate: 4 inch.

Technical characteristics:

- Temperature range: 350±1250 C; Temperature control: termocuples; Diffusion processes ;

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Applications:

• Deposition processes from liquid source POCl3;
• Deposition processes from solid source BN, B+, P+;
• Dry oxidation;
• Wet oxidation(oxidation using the bubbling system of the water);
• Annealing processes on  N2;
• Alignment/sinterizing processes(formation gas 3%H2);
• Solid state difusion;
• CVD processes;
• thermal treatment in oxidizing, reducing, inert and forming gas atmosphere;

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Last update: February 28, 2011