Processing equipments
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Mask fabrication and lithography tools |
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Laser lithography system - DWL 66 fs, direct writing laser, high resolution pattern generator (Heidelberg Instruments Mikrotechnik, Germany); [...more details] |
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Double Side Mask Aligner - MA6/BA6 (Suss MicroTec, Germany) for optical lithography (DUV, UV), nanoimprint lithography (NIL-UV) [...more details] |
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Electron Beam Lithography and nanoengineering workstation - e_Line (Raith, Germany ) [ ...more details] |
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Dip Pen Nanolithography Writer - NSCRIPTOR (NanoInk, Inc., USA) [...more details] |
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| Physical deposition tools |
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Electron Beam Evaporation an DC sputtering system - AUTO 500 (BOC Edwards, UK) [...more details] |
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Electron Beam Evaporation system - EVD 500A (Neva, Japan) [...more details] |
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Vacuum coating system, boat evaporation - BAK-500 (Balzers, Switzerland) [...more details] |
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Chemical deposition tools |
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PECVD - LPX-CVD, with LDS module (STS, UK) - to be installed soon [...more details] |
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LPCVD - LC100 (AnnealSys, France)- to be installed soon; [...more details] |
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APCVD - PYROX (Tempress, UK) - to be installed soon [...more details] |
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Dry etching tools |
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RIE Plasma Etcher - Etchlab 200 (SENTECH Instruments, Germany) [...more details] |
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DRIE- Plasmalab System 100- ICP Deep Reactive Ion Etching System [...more details] |
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Thermal processing tools |
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Furnace - oxidation, diffusion, sintering (Lindberg) [...more details] |
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Furnace - rapid thermal processing/annealing - AS-One (AnnealSys, France) [...more details] |
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Microarrays, Biomolecule research |
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Micro-Nano Plotter - OmniGrid (Genomic Solutions Ltd., UK) [...more details] |
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Microarray Scanner - GeneTAC UC4 (Genomic Solutions Ltd., UK) [..more details] |
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Zeta Potential and Submicron Particle Size Analyzer - DelsaNano (Beckman Coulter, USA) [...more details] |
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Wetbenches, Glove-box |
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Glove box for preparation and deposition of nanocomposites and organic layers under N2 athnosphere(Salare, USA) |
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Masks processes: resist development, Cr etching, resist removal, DI cleaning (Atechim, Romania) [...more details] |
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Other tools |
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Die Bonding System |
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Wire Bonding System |
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Wafer Bonder System- SB6L-
Wafer - Substrate Bonder System [...more details] |
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HOME |
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Last update: February, 2012 |
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