| MINAFAB | Processing equipments |
Spinner
Tool Name Spinner Manufacturer SUS MICROTEK Tool responsible and Process responsible Adrian Albu Status and tool description 2” – 4”; fragments; Rotation angular speed: “low” to 6000 rpm, programmable 10 steps, programmable ramping. Thickness of deposited layer: 1000Å- several µm
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| Application scientist: eng. Adrian Albu, [email protected] |
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Last update: February 27, 2011 |
