Scientific results
- SAW devices for GHz applications with nanolithographic IDTs
SAW resonator (with reflectors) on GaN/Si with 250nm fingers and interdigits patterned in IMT on the new “E-Line” equipment
- GaN FBARs obtained by micromachining of GaN/Si340 nm (GaN) +200nm (buffer) thin membrane supported FBAR structure based on GaN micromachining
Photo of the GaN membrane FBAR
- AlN based FBAR structure
Photo of the AlN membrane FBAR
- Manufacturing of PZT cantilever for devices of 500 micro watt
PMN-PZT triple morph cantilever for electric harvesting devices (Insung Kim*, Hyeonkyu Joo, Soonjong Jeong, Minsoo Kim),
Electric harvesting of the cantilever with (a) bi-morph, (b) triple-morph as a function of load resistance and out voltage at the resonance frequency.
The main scientific events in connection with the bilateral project and the description of the scientific publications: authors, title, journal or publisher
Scientific publications in Journals and proceedings of international conferences:
- Insung Kim, Hyeonkyu Joo, Soonjong Jeong, Minsoo Kim, and Jaesung Song„Micro power generation of PMN-PZT triple morph cantilever for electric harvesting devices” Phys. Status Solidi C7, No. 9, 2331–2335 (2010) / DOI 10.1002/pssc.200983754;
- Alexandru Müller, Dan Neculoiu, , George Konstantinidis, George Deligeorgis, Adrian Dinescu, Antonis Stavrinidis, Alina Cismaru, Mircea Dragoman, Alexandra Stefanescu "SAW devices manufactured on GaN/Si for frequencies beyond 5 GHz," Electron Devices Lett. 2010, vol 31, no. 12, pp1398-1400 Electron Devices Lett. 2010,
- A. Müller, D. Neculoiu, A. Stavrinidis, T. Kostoupulos, A. Dinescu,A. Cismaru, D. Vasilache, G. Deligiorgis C. Buiculescu, A.A.Müller, I. Petrini, D. Dascalu and G. Konstantinidis „Recent progresses in acoustic devices on GaN/Si” proc of MEMSWAVE 2010, Otranto, Italy
- Cismaru, A. Stavrinidis, A. Stefanescu, D. Neculoiu, G. Konstantinidis and A. Müller „Morphological characterisation of micromachined film bulk acoustic resonator structures manufactured on GaN/Si” Proceedings of the 21-st Micromechanics and Micro-systems Workshop MME 2010, Twente September 2010, pp 281-284
- Stefanescu, A. Muller, A. Dinescu, G. Konstantinidis, A. Cismaru,. Stavrinidis, D. Neculoiu* „FEM analysis of GaN based surface acoustic wave resonators” Proceeding of CAS’2011, pp177-180
- A. Müller, D. Neculoiu, A. Dinescu, A Cismaru, A. Stefanescu, C.Buiculescu, I Petrini, G. Konstantinidis, A. Stavrinidis, G. Deligeorgis, „FBAR and SAW devices on GaN/Si operating in the GHz frequency range” Proc. of EPOSS 2011
Staff and student exchange:
2010
Dr Kim Insung visits Romania, during 14-17 October 2010, RF MEMS lab. and the MINAFAB facility at IMT Bucharest and sustained a seminar presenting the KERI Institute together with its scientific topics.
The Romanian scientists Dr Neculoiu Dan, Fiz. Petrini Ioana and MSc Bunea Alina have visited KERI Institute, the LG company and the RFID Korea exhibition during December 2010.
2011
Dr Kim Insung has visited IMT Bucharest and has participated at 2011 International Semiconductor Conference (CAS 2011), an IEEE event (15- 20 October 2011). A common round table workshop IMT-KERI regarding the follow up of this collaboration has been organized. Dr G Konstantinidis from FORTH-Heraklion, has participated at the round table and directions for future bi and trilateral co-operations have been discussed.
In November 2011, Romanian scientists Dr Alexandru Muller, project coordinator from IMT, Dr. Alina Cismaru, Dr Anton Cornel and Dr. Adrian Dinescu visits KERI Institute, Changwon, KBSI center of materials and nanotechnology research from Busan technological park and the RFID/USN KOREA 2011 exhibition from Seoul.