Dr. Dan Vasilache, director de proiect

• 1990 – 1995 Univ. Bucharest, Facultatea de Fizica (Sectia Fizica Atomului si a Moleculei, Astrofizica)
• 2004 – 2011 Doctor in domeniul Ingineri Electronica si Telecomunicatii, Univ. Politehnica din Bucuresti, "Tehnologii de realizare a structurilor MEMS"

Specializari in domeniu:

• Scoala de vara AMICOM, ed. a 2-a, "Advanced MEMS for RF and Millimeter Wave Communications ", 28 sept - 1 oct 2005, Sinaia, Romania
• Scoala de vara AMICOM, ed. a 3-a, "Advanced MEMS for RF and Millimeter Wave Communications ", 28 aug - 1 sept 2006, Imperial College, Londra, UK.
• Curs "RF MEMS and NEMS" (AM Ionescu), EPFL Lausanne, Elvetia, FSRM & EPFL Lausanne, 2006.
• Curs "Microfabrication processes" (I Rangelow), IMT-Bucuresti, FSRM & IMT Bucharest, 2010.

Locuri de munca:

• 1995 - 2009 Institutul National de Cercetare-Dezvoltare pentru Microtehnologie (IMT Bucuresti)
• 2010 - 2012 Bruno Kessler Foundation – Center for Materials and Microsystems Trento, Italia (FBK-CMM)
• 2013-prezent Institutul National de Cercetare-Dezvoltare pentru Microtehnologie (IMT Bucuresti)

Premii:

• Premiul Academiei Romane "Tudor Tanasescu" (in echipa), pentru studiul "Micromachined
  circuits for microwave and millimeter wave applications – MEMSWAVE", 2003
• Premiul al doilea la expozitia CONRO 2003 (in echipa) pentru proiectul SIRMEMS (MATNANTECH)
• Finalist al premiilor Descartes 2002 (in echipa) cu proiectul MEMSWAVE

Articole in reviste cotate ISI (selectie):

• D. Vasilache, S. Colpo, F. Giacomozzi, S. Ronchin, S. Gennaro, A.Q.A. Qureshi, B. Margesin, "Through wafer via holes manufacturing by variable isotropy Deep RIE process for RF applications", Microsyst Technol, Vol. 18, 7-8, 2012, 1057-1063.
• A. Müller, G. Konstantinidis, M. Dragoman, D.Neculoiu, A.Dinescu, M. Androulidaki, M. Kayambaki, A.Stavrinidis, D. Vasilache, C.Buiculescu, I.Petrini, A. Kostopoulos, D. Dascalu, "GaN membrane-supported UV photodetectors manufactured using nanolithographic processes", Microelectronics Journal Vol. 40 Issue 2, 2009, pp.319-321.
• A. Muller, D. Neculoiu, G. Konstantinidis, A. Stavrinidis, D. Vasilache, A. Cismaru, M. Danila, M. Dragoman, G. Deligeorgis, K, Tsagaraki, "6.3 GHz Film Bulk Acoustic Resonator Structures Based on a Gallium Nitride/Silicon Thin Membrane", IEEE Electron Devices Letters, vol 30, no 8, 2009, pp 799-801.
• A. Müller, G. Konstantinidis, M. Dragoman, D. Neculoiu, A. Kostopoulos, M. Androulidaki, M. Kayambaki D. Vasilache, "GaN membrane metal–semiconductor–metal ultraviolet photodetector", Applied Optics, Vol. 47, No. 10, 2008, pp 1453-1456.
• A. Takacs, D. Neculoiu, D. Vasilache, A. Muller, P. Pons, L. Bary, P. Calmon, H. Aubert, R. Plana, "Tunable bandstop MEMS filter for millimetre-wave applications", Electronics Letters, Vol.43, Iss.12, June 2007, p. 676-677.
• M Saadaoui, P Pons, R Plana, L Bary, D Dubreuil, D Bourrier, D Vasilache, D Neculoiu, A Muller, "Dry followed by wet backside etching processes for micromachined endfire antennae", J. Micromech. Microeng., vol.15, no.8, 2005, S65-S71.
• D. Neculoiu, G.Bartolucci, P. Pons, L. Bary, D. Vasilache, A. Müller , R. Plana, "Compact membrane-supported bandpass filter for millimeter-wave applications", Electronics Letters, vol.40, No.3, pp.180-182, 2004.
• D. Neculoiu, P. Pons, L. Bary, M. Saadaoui, D. Vasilache, K. Grenier, D. Dubuc, A. Müller, R. Plana, "Membrane Supported Yagi-Uda Antennae for Millimeter-Wave Applications", IET Microwaves Antennas & Propagation, Vol 151, No. 4, August 2004, pp.311-314.

Articole publicate la conferinte internationale, in reviste cotate si in volumele unor manifestari stiintifice indexate in alte baze de date internationale (selectie):

• D.Vasilache, S.Colpo, B.Margesin, F.Giacomozzi, M.Chiste, P.Schiopu, "Optimized DRIE process for tapered walls through wafer via holes manufacturing", U.P.B. Sci. Bull., Series C, Vol. 74, Iss. 2, 2012, pp.291-298.
• D. Vasilache, M. Chistè, S. Colpo, F. Giacomozzi, B. Margesin, "Wafer resistivity influence over DRIE processes for TSVs manufacturing", IEEE International Semiconductor Conference (CAS 2012 Proceedings), 2012, Sinaia, Romania, pp. 175-178.
• A.Q.A. Qureshi, S. Colpo, D. Vasilache, S. Girardi, P. Conci, B. Margesin, "Thermocompression bonding for 3D RF MEMS devices using gold and silver as intermediate layer", IEEE International Semiconductor Conference (CAS 2012 Proceedings), 2012, Sinaia, Romania, pp. 183-186.
• Dan Vasilache, Sabrina Colpo, Flavio Giacomozzi, Sabina Ronchin, Abdul Qader Ahsan Qureshi and Benno Margesin, "Variable isotropy Deep RIE process for through wafer via holes manufacturing", Proc. SPIE 8066, 80662J (2011); http://dx.doi.org/10.1117/12.887196.
• D. Vasilache, S. Colpo, F. Giacomozzi, B. Margesin, M. Chistè, "Fabrication of Through-Wafer Interconnections by Gold Electroplating", IEEE International Semiconductor Conference (CAS 2011 Proceedings), 2011, Sinaia, Romania, pp. 163-166.
• D.Vasilache, G.Constantinidis, M.Dragoman, A.Takacs, F.Vladoianu, T.Kostopoulos, G.Boldeiu, V.Moagar, C.Tibeica, L.Bary, R.Plana, "MEMS switch for 60 GHz band", Proceedings of SPIE Vol. 7821, 78210O (2010); http://dx.doi.org/10.1117/12.881775.
• D. Vasilache, S. Colpo, S. Ronchin, F. Giacomozzi, B. Margesin, "V-shape through wafer via manufactured by DRIE variable isotropy process", IEEE International Semiconductor Conference (CAS 2010 Proceedings), 2010, Sinaia, Romania, pp. 235-238.
• A.Takacs, D. Neculoiu, D. Vasilache, A. Muller, P. Pons, L. Bary, P. Calmon, H. Aubert, R. Plana, "Tunable Bandstop and Bandpass MEMS Filters for Millimeter Wave Applications", Proc. of 38th European Microwave Conference, IEEE, pp. 591–594.
• A.Takacs, D. Neculoiu, D. Vasilache, A. Muller, P. Pons, L. Bary, P. Calmon , R.Plana, H.Aubert, "New Topologies of Tunable Bandstop MEMS Filters for Millimeter Wave Applications", European Microwave Week, EuMW-EuMC 2007, Munchen, Germany, 8 – 12 October 2007 pp 126-129.
• D. Vasilache, M. Dragoman, G. Constantinidis, Y. Psychias, F. Vladoianu, T. Kostopoulos, C. Tibeica, L. Bary, A. Cismaru, D. Neculoiu, C. Buiculescu, I. Petrini, R. Plana, A. Muller, "60 GHz band RF MEMS switch", Proc of International Semiconductor Conference, CAS 2006, Sinaia, Sept 2006, pp. 119-122.
• A.Coraci, C. Podaru, D. Vasilache, E. Iancu, A. Ciuciumis, A. Popescu, O. Corici, "Two Alternative Low Temperature Technological Methods for Microchannels Microfabrication", Proc of CAS 2006.
• A.Müller, M. Saadoui, P. Pons, D. Neculoiu, L. Bary, D.Dubuc, K.Grenier, D. Vasilache, C. Buiculescu, I. Petrini, R. Plana, "Membrane supported endfire antennas manufactured using silicon micromachining", Proc. IEEE Int. Workshop on Antenna Technology 2005, pp. 113-116.
• D.Vasilache, C.Tibeica, V.Moagar, R.Enachescu, M.Iordache, F.Vladoianu, C.Podaru, E.Manea, A.Müller, "MEMS Switches: Design and Manufacturing", 2004 International Semiconductor Conference, 27th Edition, October 4-6, 2004, Sinaia, Romania, p. 169.

Capitole in carti (selectie):

• D.Vasilache, S.Ronchin, S.Colpo, B.Margesin, F.Giacomozzi, S.Gennaro, "Tappered walls via holes manufactured using DRIE variable isotropy process", in Novel RF MEMS Technologies, Series in Micro and Nanoengineering, Pub. House of the Romanian Academy, Bucharest, 20, 2012, pp. 259-267.
• A. Müller, D. Neculoiu, A. Stavrinidis, T. Kostopoulos, A. Dinescu, A. Cismaru, D. Vasilache, G. Deligeorgis, C.Buiculescu, A.A. Müller, I.Petrini, D. Dascalu, G. Konstantinidis, "Recent progress in acoustic devices on GaN/Si", in Microwave Circuits and Devices Based on MEMS Technologies, Series in Micro and Nanoengineering, Publishing House of the Romanian Academy, Bucharest, 18, 2011, pp. 359-365.
• A.Takacs, D.Neculoiu, D.Vasilache, A.Muller, P.Pons, L.Bary, P.Calmon, R.Plana, H.Aubert, "Tunable bandstop MEMS filters for Ka and V-band applications", in "Recent Developments in MEMS Technologies", Series in Micro and Nanoengineering, Publishing House of the Romanian Academy, Bucharest, 12, 2008, pp. 229-236.
• A Takacs, D Vasilache, C Tibeica, D Neculoiu, "A new topology of RF MEMS shunt switch for reconfigurable systems applications", in MEMS technologies for RF and millimeter wave circuits, Series in Micro and Nanoengineering, Publishing House of the Romanian Academy, Bucharest, 8, 2006, pp. 107-113.
• F Giacomozzi, B Margesin, I Petrini, D Vasilache, D Neculoiu, C Buiculescu, A Müller, G Konstantinidis, T Vaha-Heikkila, T Kostopoulos, Y Psychias, "Surface and bulk micromachining techniques for lumped components filters manufacturing", in MEMS technologies for RF and millimeter wave circuits, Series in Micro and Nanoengineering, Publishing House of the Romanian Academy, Bucharest, 8, 2006, pp. 210-215.
• M. Saadaoui, A. Muller, P. Pons, L. Bary, D. Neculoiu, F. Giacomozzi,D. Dubuc, K. Grenier, L.Rabbia, D. Vasilache, R. Plana, "Fabrication of silicon based micromachined antennas for millimeter-wave applications", in MEMS technologies for millimeter wave devices and circuits, Series in Micro and Nanoengineering, Publishing House of the Romanian Academy, Bucharest, 5, 2004, pp. 43-49.