The NEMS / MEMS area focuses on design and fabrication of new complex devices on silicon, for applications in many interdisciplinary areas, from biomedicine (optoelectronic biosensors) to energy harvesting (miniaturized fuel cell devices such as clean energy sources).

The developed nanomaterials / nanostructures exhibit properties which make them attractive for improving the existing devices’ characteristics. These novel systems assume merging various state of the art devices and sensor technologies (NEMS and MEMS, micro- and nanofluids, optical and semiconductor based devices) in multifunctional microsystems like:

• (electrochemical) sensors for biological investigations, environment monitoring and food quality control;
• lab-on-chip platforms targeted in nanomedicine;
• integrated micro-DMFC (direct methanol fuel cell);
• integrated systems for active / pasive release of drugs.