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Technology convergence |
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Silicon – polymers integration (mostly used in microfluidic systems); |
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Silicon – glass integration (for biosensors and lab-on-chip devices); |
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Surface functionalisation. |
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Design and modelling |
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Advanced mask design editing, mask layout transfer; |
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Anisotropic etch simulations; |
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2D to 3D model building, based on virtual technological processing; |
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MEMS Simulation and modelling: mechanical, electrical, thermal, inertial simulations; |
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Coupled multi-domain modelling (electro-thermal, electro-mechanical, electro-thermo-mechanical etc.); |
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Virtual microfluidics models generation; |
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Microfluidic simulation and modelling: regular flow |
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