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RESEARCH AREAS
   
  Quantum computing technologies
  Integration of nano scale carbonic, bidimensional and ferroelectric materials
  Acoustic devices (FBARs and SAWs) for applications in the GHz frequency raqnge, based on micromachining and nanoprocessing of wide band gap semiconductors, (GaN and AlN)
  Design and manufacturing of micromachined, passive circuits elements, monolithically and hybrid integrated receiver front-ends based on silicon and GaAs micromachining
  Novel microwave devices based on CNT and graphene
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  Microwave devices using CRLH materials (metamaterials)
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  New directions
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Quantum computing technologies

   
  - Single and two-port SAW type structures having resonance frequency > 6 GHz with magnetostrictive layer, developed and manufactured on GaN/Si. (CHIRON H2020 FET OPEN project)
 
SAW structure having one port with CoFeBe magnetostrictive element (lateral from the IDT)
Two ports SAW structure having Pt/Ni magnetostrictive elements between thr two IDTs
 
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Coupling the surface and bulk acoustic waves with the spin waves.

   
 
wIDT = 170 nm wIDT = 100 nm

S11 for face to face SAW structures with Ni/FeGa magnetostrictive layer between IDTs (SEM imige for the SAW with wIDT = 100 nm

   
 
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  - Magnetic sensors based on GaN/Si one port SAW resonators (CHIRON H2020 FET OPEN project)
  One port SAW resonators, having resonance frequencies >6 GHz, have been manufactured on GaN/Si. Two different magnetostrictive elements (Ni and CoFeB) have been directly deposited on the interdigital transducer (IDT) of the SAW structures. The variation of the resonance frequency with the applied magnetic field was analyzed for GaN/Si SAW resonators, having these types of magnetostrictive elements.  The magnetic sensitivity of SAW structures was analyzed at room and cryogenic temperatures for a magnetic field, H, between 0 and 3600 Oe. A very high sensitivity (800 ppm) has been obtained at T = 16 K for the SAW structures having Ni as magnetostrictive element deposited on the IDT. The SAW structures having Ni in the composition of the IDTs were simulated in Comsol Multiphysics and the effect of the magnetic field on the stress of the structure has been analyzed at room temperature and also at the cryogenic temperature of 16 K.
 
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b
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The relative resonance frequency shift vs. H for SAW structures with (a) CoFeB layer and (b) Ni layer deposited on the IDTs; (c) FEM simulation of the magnetic field from the IDTs area for SAW structures having Ni deposited on IDTs at B = 3000 Oe and T = 16 K

(cooperation between IMT, IMEC and Technische Universitaet Kaiserslautern)

 
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  - Cryogenic measurements of the transfer characteristics for qubit pMOS type transistors (iQubits H2020, FETOPEN project)
 

The transfer characteristics (source-drain current function of gate source-voltage) were analyzed for qubit SiGe pMOS type transistors, designed by the University of Toronto (UofT) and manufactured in 22 nm technology. The transfer characteristics of the pMOS type transistors have been performed by maintaining the value of the drain voltage at -10 mV and varying the temperature between 50 K and 6 K. The measurements were performed with a cryogenic equipment (able to cool down to 5 K) developed in the frame of the laboratory for microwave (on wafer) measurements up to 67 GHz.

Transfer characteristics of pMOS transistor for (a) different temperature values at a constant drain voltage value and (b) different drain voltage values at a temperature of 1.65 K
(cooperation between IMT and University of Toronto)

Measurement set-up  for S paramater up to 140 GHz, in the temperature range of 297K - 6 K.

 
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  - Cryogenic measurements of 1x18nmx70nm pMOSFET (iQubits H2020, FETOPEN project)
 

Cryogenic measurements of 1x18nmx70nm pMOSFET fabricated in a FDSOI CMOS process were used to demonstrate a compact DC I-V characteristic model which adds a tunnelling component on top of the classical MOSFET foundry model to capture quantum and Coulomb Blockade effects. The measurements were performed on-die at 6.2 K. The measured (performed in IMT) and simulated (by UofT) stability diagram, with the Coulomb Blockade, shows a good accuracy across VGS and VDS values relevant for operation as a single-hole transistor (SHT).

Measured at IMT (left) and simulated at UofT (right) stability diagram for 1x18nmx70nm p-MOSFET at 6.2K

  - Tehnologies for single electron transistor as qubits elements (iQubits H2020, FETOPEN project)
 
 

SEM micrograph of 10 nm wide HSQ lines

 
 

Nanolithographic gate lines having  <10 nm resolution

 

Integration of nano scale carbonic, bidimensional and ferroelectric materials
 
  - Electromagnetic modeling of switches and filters based on vertical carbon nanotubes for applications at frequencies around 60 GHz (SMARTWAY- HORIZON-EIC project )
 

Switches and filters based on vertical carbon nanotubes were designed for applications at frequencies around 60 GHz using both a circuit simulator (NI AWR Design Environment) and a 3D electromagnetic simulator (CST Microwave Studio). The following parameters were used to design the devices: length L= 4.9 mm on the x coordinate and width W = 2.5 mm on the y coordinate. The thickness of the high resistivity silicon (HRSi) substrate is 300 μm, and of the thin silicon oxide (SiO2) layer is 1 μm. The thickness of the gold layer is 500 nm. The parameters S (reflection and transmission coefficient) were obtained as a result of the electromagnetic simulation of the device and the optimal operation of the filters around the frequency of 60 GHz was demonstrated. After the optimization of all the geometric parameters, the GDS files were obtained for the masks necessary for the manufacture of the devices.

a) The three-dimensional structure for filters based on carbon nanotubes obtained with the help of the electromagnetic simulator.
b) Detail from the central area of ​​the device.
a) b)

c) d)
S parameters: (a) reflection coefficient at port 1; (b) reflection coefficient at port 2; (c) transmission from port 2 to port 1; (d) transmission from port 1 to port 2 for carbon nanotube filters.
 
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  - Modeling, manufacturing and experimental characterization of bow-tie antennas and antenna networks at 24 GHz ( NANO-EH H2020-FETPROACT project)
 

Bow-tie type antennas with an operating frequency of 24 GHz were made on a silicon substrate. This component will be used to harvest RF energy at the operating frequency of 24 GHz using self-switching diodes (SSD) based on molybdenum disulfide (MoS2). The 24 GHz bow-tie antennas with/without SSDs were fabricated using a monolayer of MoS2 deposited on a sapphire and silicon substrate.

Optical pictures for the fabricated devices: (a) 24GHz bow-tie antennas; (b) detail with the gap between the two sides of the antennas; (c) self-switching diodes fabricated using MoS2 by CPW technology; (d) detail with the diode surface on the coplanar line.

 
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  - Beam-steering antenna arrays based on nanostructured graphene/graphite for advanced microwave communications (STEERING-GRAPH PN-III-P4-PCE project )
 

1. Antennas and antenna arrays were simulated based on NCG, at 10 and 24 GHz. An array of 2 antennas based on NCG at 10 GHz was simulated, manufactured and characterized, which was characterized in direct current (cc) and in microwaves, both in the near field and in the far field. It was demonstrated the reconfiguration of the array gain depending on the DC voltage applied to the NCG layer.

Reflection coefficient (left) and received power (right) for the antenna array based on NCG at 10 GHz.

2. Types of memtransistors were designed: one of planar FET type with one channel based on NCG deposited on HfZrO and one of interdigitated capacitor (IDC) type on low resistivity silicon, with area-selective wet etched HfZrO between the capacitor digits.

Fabricated IDC (left) and drain current-drain voltage curves with open gate (right)

 
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Acoustic devices (FBARs and SAWs) for applications in the GHz frequency raqnge, based on micromachining and nanoprocessing of wide band gap semiconductors, (GaN and AlN)

   
  - FBAR devices based on micromachining of GaN
 

GaN/Si FBAR resonating at 6.3 GHz

A. Müller, D. Neculoiu, G. Konstantinidis, A. Stavrinidis, D. Vasilache, A. Cismaru, M. Danila, M. Dragoman, G. Deligeorgis and K. Tsagaraki, 6.3 GHz Film Bulk Acoustic Resonator Structures Based on a Gallium Nitride/Silicon Thin Membrane, IEEE Electron Devices Letters, vol 30, no 8, August 2009, pp 799-801

 
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  - SAW devices based on nanoprocesing of GaN/Si
 

SAW structure on GaN/Si resonating at 5.7 GHz

A. Müller, D. Neculoiu, , G. Konstantinidis, G. Deligeorgis,  A. Dinescu, A. Stavrinidis, A. Cismaru, Mi. Dragoman, A. Stefanescu, SAW devices manufactured on GaN/Si for frequencies beyond 5 GHz, IEEE Electron Devices Lett. 2010, vol 31, no. 12, pp1398-1400

 
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  - Temperature sensors  based on GHz SAW devices
 

Resonance frequency vs temperatute  for GaN/Si SAW structures with nanometric IDTs  (first measurements)

 
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  - Gas sensors based on SAW devices
 

Design and manufacturing of micromachined, passive circuits elements, monolithically and hybrid integrated receiver front-ends based on silicon and GaAs micromachining

- GaAs membrane supported millimeter wave receiver operating in the 60 GHz frequency range based on the monolithic integration of a Yagi-Uda antenna with a Schottky diode, both having as support the same 2.2 µm thin semi-insulating GaAs membrane
- Novel micromachined lumped bandpass filter for 5.2GHz WLAN applications
- Millimeter wave identification system at 60 GHz
- 77 GHz receiver in LTCC technology

Resonance frequency vs temperatute  for GaN/Si SAW structures with nanometric IDTs  (first measurements)
 
   
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Design and manufacturing of micromachined, passive circuits elements, monolithically and hybrid integrated

receiver front-ends based on silicon and GaAs micromachining
   
 
- GaAs membrane supported millimeter wave receiver operating in the 60 GHz frequency range based on the monolithic integration of a Yagi-Uda antenna with a Schottky diode, both having as support the same 2.2 µm thin semi-insulating GaAs membrane
 

Yagi-Uda antenna in a 60GHz  membrane supported receiver

 
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  - Novel micromachined lumped bandpass filter for 5.2GHz WLAN applications
 

SEM photos of the WLAN 5200 filter : top view

Andrei A. Muller, D. Neculoiu, A. Cismaru, P. Pons, R. Plana, D. Dascalu, A.Muller,
Novel micromachined lumped bandpassfilter for 5.2GHz WLAN applications, Int J Electron Commun (AEU) 65 (2011) 1050-1053

 
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  - Millimeter wave identification system at 60 GHz
 

Millimeter wave identification system at 60 GHz

P. Pursula, T. Vaha-Heikkila, A. Muller, D. Neculoiu, G. Konstantinidis, A. Oja and J. Tuovinen, Millimetre Wave Identification - A new short range radio system for low power, high data rate applications, IEEE Trans on MTT, vol 56, No 10, Oct 2008, pp 2221-2228.

 

 
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  - 77 GHz receiver in LTCC technology
 

77 GHz receiver designed by IMT Bucharest and processed at VTT Finland

D. Neculoiu, M. Lahti, A. C. Bunea, A. Stefanescu, T. Vaha – Heikkila, Design and Experiments of a 77 GHz Receiver in LTCC Technology, Proceedings of Asia – Pacific Microwave Conference, Melbourne December 2011

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  - passive circuits elements, monolithically and hybrid integrated receiver front-ends based on silicon and GaAs micromachining, UV photodetectors based on GaN/Si membranes
 

SEM photo of the GaN membrane UV detector structure with finger/interdigit spacing 100 nm wide; the inset presents a detail of the MSM structure obtained using a single metal/resist layer nanolithographic process

A. Müller, G. Konstantinidis, M. Androulidaki, A. Dinescu, A. Stefanescu, A.Cismaru, D. Neculoiu, E. Pavelescu and A. Stavrinidis, Front and Back-Side Illuminated GaN/Si based Metal – Semiconductor - Metal Ultraviolet Photodetectors Manufactured Using Micromachining and Nano-lithographic Technologies, Thin Solid Films, 520 (2012) pp 2158-2161

   
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Novel microwave devices based on CNT and graphene

   
 
- FET based on CNT transistor
 
a)
b)

Photos of the FET-like device: (a) top view showing drain source gate layout; (b) SEM close-up on the suspended DWCNT bundle and 1µm gate electrode

M. Dragoman, G.  Konstantinidis, A. Kostopoulos, D.Dragoman, D. Neculoiu, R. Buiculescu, R.Plana, F. Coccetti, and H. Hartnagel, Multiple negative resistances in trenched structures bridged with carbon nanotubes, Appl. Phys. Lett. 93, 043117, 2008.

 
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  - Coplanar line on graphene with variable transmission response up to 60 GHz and 50 ohm impedance
 

CPW lines on grapheme

M.Dragoman, D.Neculoiu, A.Cismaru, A.A. Muller, G. Deligeorgis, G. Konstantinidis, D.Dragoman, and R.Plana, Coplanar waveguide on graphene in the range 40 MHz-110 GHz, Appl. Phys. Lett. 99, 033112 (2011)
   
  - Sensing DNA using carbon nanotubes
 

Optical photo through microwave characterization
of the DNA sensing device

SEM image of DNA and CNT composite deposited
on the coupled lines structure

 
   
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  Microwave devices using CRLH materials (metamaterials)
 
 
- Zero rezonance (ZOR) CRLH Antenna on Silicon Substrate
 

Optical microscopy photo showing the active part of the CRLH antenna

Alina-Cristina Bunea, F. Craciunoiu, Gh. Sajin, (2011): 28 GHz CRLH Antenna on Silicon Substrate, 41st European Microwave Conference, EuMC 2011, 09 – 14 Oct. 2011, Manchester, U.K., pp. 579 – 582. ISBN: 978-2-87487-021-7

   
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- Millimeter Wave CRLH Band-Pass Filter on silicon substrate
 

Band pass filter (BPF) structures with one, two and four CRLH cells; a BPF structure supports the probe-tips of the on-wafer measuring system

G. Sajin, S. Simion, F. Craciunoiu, A. C. Bunea, A. Dinescu, M. Zamfirescu, L. Neagu, R. Dabu, (2010), Millimeter Wave Metamaterial Band-Pass Filter by Femtosecond Laser Ablation, Proceedings of European Microwave Conference, Paris, France, 26 Sept. – 01 Oct. 2010, pp. 1393 – 1396, ISBN 978-2-87487-015-6.
   
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- CRLH mm-Wave Directional Coupler on Silicon Substrate

Structure of a CRLH CPW directional coupler

G. Sajin, A. C. Bunea, Fl. Craciunoiu, A. Dinescu, M. Zamfirescu, R. Dabu (2011): CRLH mm-Wave Directional Coupler on Silicon Substrate Microprocessed by Laser Ablation. Proceedings of the International IEEE Conference on Microwaves, Communications, Antennas and Electronic Systems, IEEE COMCAS 2011, 07 – 09 Nov. 2011, Tel Aviv, Israel, Paper ID 2A1-1.

   
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New directions

   
  - New methods for microwave circuits design, based on modern mathematical tools
 

A 3D Smith chart which can be used for the design for all passive and active circuits, has been developed by PhD student Andrei Muller (PhD since Oct 2011). Using the concepts of extended complex plane, inversive geometry and Riemann sphere the generalized Smith Chart can include all the complex loads in the reflection coefficient plane.

3-D spherical Smith Chart obtained after performing the stereographic projection

Andrei A. Muller, Pablo Soto, Dan Dascalu, Dan Neculoiu and Vicente E Boria, A 3D Smith Chart based on the Riemann Sphere for Active and Passive Microwave Circuits, IEEE Microwave and Wireless Comp. Lett, vol 21 no 6 pp 286-288, 2011

   
   

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