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 Integrated Chips for biophotonics |
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Heterogeneous integration of polymeric waveguides with silicon photodiodes |
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7.5 µm wide straight PMMA waveguide leacky-wave coupled with a Si photodiode – optical images and light propagation
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Co-operation with Institute for Microstructure Technology (IMT), Forschungszentrum Karlsruhe (FZK), Germany |
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SU-8 waveguide coupled with a silicon photodiode with a diffractive grating |
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The optical coupling waveguide- photodiode is obtained with a grating realized in the bottom clading of the waveguide (pitch 4 µm).
The coupling eficiency depends on the refractive index of the surrounding media.
Applications: chemo and biosensors. |
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Optical image of the waveguide coupled with the photodiode |
Optical image: grating etched in SiO2 |
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AFM image of the coupling region
(waveguide placed on the grating)
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Image of the chip with bondig wires for the photodiode |
Co-operation with Institute for Microstructure Technology (IMT), Forschungszentrum Karlsruhe (FZK), Germany |
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SU-8 waveguide coupled with a silicon photodiode |
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The optical coupling waveguide- photodiode is obtained with a grating realized in the bottom clading of the waveguide (pitch 4 µm).
The coupling eficiency depends on the refractive index of the surrounding media.
Applications: chemo and biosensors. |
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Output waveguide coupled with photodiode |
Probe waveguide arm with sensing layer as cladding |
Y junction and reference photodiode coupled with the reference arm |
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SEM image of the coupling region (waveguide leacky-wave coupled with a Si photodiode)
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