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Structuring technologies at the nano scale based |
| on Electron Beam Lithography and related techniques |
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- developing and refining nano-structuring technologies based on Electron Beam Lithography patterning; |
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- design and fabrication of nanostructures by EBID and EBIE; |
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- high aspect ratio structures at nm scale fabricated through EBL-based techniques; |
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- methods for nano-structuring non-conductive surfaces (glass, quartz, ceramics); |
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- fabrication of 2D and 3D nanostructures intended to be used as calibration gratings for optical microscopy, AFM and STM with better than 100 nm accuracy; |
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- additive methods for fabrication of nano-interconnects on various substrates: lift-off for metals and dielectrics by using special methods for exposure and treatment of electronresist, lithography with double layer etc; |
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Micro and nanoscale characterization |
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Scanning Probe Microscopy |
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- AFM applications to nanomechanical characterization of polymeric surfaces
- Studies of the elastic, viscoelastic and adhesive properties of polymeric materials by AFM and related techniques;
- Complementary characterization of surfaces by advanced SPM techniques
- Conceptual and practical implementation issues associated with the application of Scanning Probe techniques for characterization of materials for micro and nanoelectronics.
- Studies of organic polymers and blends
- Studies of graphene materials
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Scanning Electron Microscopy |
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- High resolution – low voltage FEG- SEM imaging |
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Nano-Indentation |
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