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RESEARCH AREAS |
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Modelling, simulation (mechanical, thermal,electrical and electrostatic, piezoelectric), coupled field |
analysis and CAD of MEMS/NEMS |
- design, development and optimization of MEMS/MOEMS components and devices (switches, cantilevers, bridges, membranes, microgrippers);
- mechanical, thermal, electrical and electrostatic, piezoelectric, as well as coupled field (static and transient) analysis;
- modeling and simulation for multiphysics problems;
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Applications:
- Integrated microsensors (mechanical, optical, nio) and actuators;
- Micro-robotics;
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| MEMS/MOEMS |
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Simulation using COVENTOR of Electrostatically
actuated RF-MEMS switches |
Simulation using COVENTOR of MOEMS:
Upper mirror of a Fabry-Perot microcavity
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(Phys. Catalin Tibeica)
Project “Design for Micro & Nano Manufacture” (PATENT - DfMM), NoE FP 6, priority 2, IST, 2004-2008
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MEMS microphone |
Displacement of the membrane under an acoustic pressure |
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Test structure for stress analysis |
Shapes of test structures under residual stress relaxation |
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| Mechanical, thermal, electrical and electrostatic, piezoelectric, coupled field analysis |
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Coupled electro-termo-mechanical simulation (Coventorware) for a robotic microgriper
a) In plane deflection of microgripper at 0.2 V; b) Temperature distribution at 0.2 V;
c) The temperatures distribution on one arm of the microgripper - FEM Simulation |
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| Composite structures that exhibit negative Poisson ratio or negative stiffness |
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Composite structures that exhibit negative Poisson ratio or negative stiffness are one of the most important research areas in materials science in our days. Such structures present an increased mechanical resistance and anusual deformational mode, making them very interesting related tog technological applications. Also, they may be considered as mechanical metamaterials. Such structures were developed using SLS methods; further work will be done to miniaturize them to micro scale.
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Copled physics simulations of a broad class of phenomena, using ANSYS multiphysics and visual basic for home made applications. Study of various methods of order reduction applicable to this kind of simulations.
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Displacement obtained for the bridge type structure at the pull-in voltage |
Analysis of the displacement function
of applied voltage |
Thermo-electro-mechanical contact simulation of a Cu-Al conecting region |
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Displacement of the electro-actuated membrane calculated with direct coupling method |
Von Mises stress calculated with direct
coupling method |
Negative Poisson structure
simulation using ANSYS |
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Last update:
February, 2012 |
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